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YAMATO plasma cleaning machine PDC610 RIE · DP mode, multi-stage parallel flat electrode
PDC610 small and multi-stage plasma cleaning machine
Product details
Plasma cleaning machine
PDC610
Small, multi-stage plasma cleaning machine.
characteristic
600W small high output power.
The electrode can be selected in sections 1, 2, and 3 (specified during procurement).
Can handle vertical sample storage boxes.
RIE/DP mode can be selected (specified during procurement).
Data logger (optional).
Adaptation point memory function (optional).
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